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The effects of annealing temperatures on composition and strain in SixGe(1-x) obtained by melting growth of electrodeposited Ge on Si (100)

机译:退火温度对Si(100)上电沉积Ge的熔融生长获得的SixGe(1-x)的成分和应变的影响

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摘要

The effects of annealing temperatures on composition and strain in SixGe1-x, obtained by rapid melting growth of electrodeposited Ge on Si (100) substrate were investigated. Here, a rapid melting process was performed at temperatures of 1000, 1050 and 1100 degrees C for 1 s. All annealed samples show single crystalline structure in (100) orientation. A significant appearance of Si-Ge vibration mode peak at similar to 400 cm(-1) confirms the existence of Si-Ge intermixing due to out-diffusion of Si into Ge region. On a rapid melting process, Ge melts and reaches the thermal equilibrium in short time. Si at Ge/Si interface begins to dissolve once in contact with the molten Ge to produce Si-Ge intermixing.
机译:研究了退火温度对Si(100)衬底上电沉积Ge的快速熔融生长获得的SixGe1-x成分和应变的影响。在此,在1000、1050和1100摄氏度的温度下执行快速熔化过程1 s。所有退火的样品在(100)方向上显示单晶结构。 Si-Ge振动模式峰值的明显出现在类似于400 cm(-1)处,这证实了由于Si向外扩散到Ge区域而存在Si-Ge混合。在快速熔化过程中,Ge熔化并在短时间内达到热平衡。一旦与熔融的Ge接触,Ge / Si界面处的Si就开始溶解,从而产生Si-Ge混合。

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